Diamond films obtained on silicone substrates by the CVD method and properties of structures based on them
نویسندگان
چکیده
At present, the technology of obtaining diamond films on silicon and other substrates is well studied. However, in all published works to date, there has been no report a layer carbide formed between film substrate. The presence (15R-SiС)1-x(Cdiamond)x structure was revealed studies structures with obtained by us chemical vapor deposition. Diamond were single-crystal (111) orientation n-type conductivity well-known CVD hydrogen-methanol (CH3OH) mixture addition certain amount (know-how) ammonia (NH3). consisted small single crystals 3–5 µm size, closely interlocked constituting continuous film. When studying current-voltage characteristics created basis films, blue-white glow blue-violet tint observed, which explained mixing photons re-emitted
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ژورنال
عنوان ژورنال: Physical sciences and technology
سال: 2023
ISSN: ['2522-1361', '2409-6121']
DOI: https://doi.org/10.26577/phst.2023.v10.i1.05